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Parametry
- 670 stránek
- 24 hodin čtení
Více o knize
Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.
Nákup knihy
Fundamentals of Microfabrication and Nanotechnology, Third Edition, Volume Two, Marc J. Madou
- Jazyk
- Rok vydání
- 2009
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Doručení
Platební metody
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- Titul
- Fundamentals of Microfabrication and Nanotechnology, Third Edition, Volume Two
- Podtitul
- Manufacturing Techniques for Microfabrication and Nanotechnology
- Jazyk
- anglicky
- Autoři
- Marc J. Madou
- Vydavatel
- CRC Press
- Rok vydání
- 2009
- Vazba
- pevná
- Počet stran
- 670
- ISBN10
- 1420055194
- ISBN13
- 9781420055191
- Série
- Štítky
- Věda, Technologie, Elektronika & Elektrotechnika, Strojírenství, Elektronika, Nanotechnologie, IBM
- Anotace
- Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.