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Semiconductor Materials and Process Technology Handbook

For Very Large Scale Integration (VLSI) and Ultra Large Scale Integration (ULSI)

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This handbook is a broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI). The technology of integrated circuit (IC) processing is expanding so rapidly that it can be difficult for the scientist working in one area to keep abreast of developments in other areas of the field. This handbook solves this problem by bringing together "snapshots" of the various aspects of the technology.

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Semiconductor Materials and Process Technology Handbook, Gary E. McGuire

Jazyk
Rok vydání
1988
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Titul
Semiconductor Materials and Process Technology Handbook
Podtitul
For Very Large Scale Integration (VLSI) and Ultra Large Scale Integration (ULSI)
Jazyk
anglicky
Rok vydání
1988
Vazba
pevná
Počet stran
688
ISBN10
0815511507
ISBN13
9780815511502
Série
Anotace
This handbook is a broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI). The technology of integrated circuit (IC) processing is expanding so rapidly that it can be difficult for the scientist working in one area to keep abreast of developments in other areas of the field. This handbook solves this problem by bringing together "snapshots" of the various aspects of the technology.