Focusing on low-energy ion-solid interactions, this book covers fundamental principles and advanced applications within materials science. It addresses critical topics like interaction potentials, binary collision kinetics, ion range, radiation damage, and sputtering. The text also includes recent findings on topography evolution, thin-film deposition, ion beam figuring, and nanostructure generation. With nearly two decades of research updates, it serves as a valuable resource for graduate students, researchers, and industry professionals in the field.
