This book provides an in-depth analysis of microelectromechanical systems (MEMS) from a mechanical engineering perspective. It explores energy transformation in MEMS, offering tools for modeling and designing microsystems. The work includes analytical and simplified formulas for flexible components and examines actuation/sensing methods with practical examples.
Focused on the dynamics of Micro-Electro-Mechanical Systems (MEMS), this textbook serves senior undergraduate and graduate students with a systematic approach to the subject. It features a wealth of solved examples and proposed problems, enhancing understanding and practical application of the concepts.
Focusing on the design and analysis of flexible hinges, this second edition offers practical insights for engineers and designers working with compliant mechanisms. It provides updated methodologies and techniques to enhance the understanding of these devices, making it a valuable resource for those involved in mechanical design and innovation.
The book emphasizes the creation of mathematical models derived from simplified physical representations of various systems, including mechanical, electrical, fluid, and thermal systems. It guides readers through the process of analyzing and designing these models, highlighting the importance of system dynamics in engineering applications.