Electron beam interactions with solids

Více o knize

The interaction of an electron beam with a solid target has been a focus of study since the early 20th century, gaining significant attention from 1960 onwards due to its importance in various fields such as scanning electron microscopy, electron-probe microanalysis, Auger electron spectroscopy, electron-beam lithography, and radiation damage. Theoretical investigations often utilize the Monte Carlo method, a numerical approach that employs random numbers to solve mathematical problems, making it particularly effective for studying electron penetration in materials. The probabilistic laws governing individual electron interactions with target atoms are well established, allowing for the computation of macroscopic interaction characteristics by simulating numerous real trajectories and averaging the results. This work aims to explore the probabilistic laws of individual electron interactions, including elastic and inelastic cross-sections, and to examine specific aspects of electron interactions such as backscattering coefficients, absorption, and secondary electron emission. Additionally, it introduces the Monte Carlo method and its applications for computing macroscopic interaction characteristics, while comparing theoretical predictions, computational simulations, and experimental data for a comprehensive understanding.