Knihobot

Integrated processing for micro- and optoelectronics

Více o knize

These proceedings focus on the technology application driving forces for multichamber approaches to semiconductor process sequences, otherwise called cluster tools or integrated processing and present research results upon which these manufacturing technologies are built.

Nákup knihy

Integrated processing for micro- and optoelectronics, Yves I. Nissim

Jazyk
Rok vydání
1994
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Doručení

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