Introduction to Micromechanisms and Microactuators

Focusing on micromechanisms and microactuators, this book serves as a foundational resource for understanding their configurations and design. It addresses a notable gap in literature by emphasizing mechanical manipulation rather than just MEMS applications. Suitable for undergraduate and introductory graduate courses, it covers miniaturization, scaling laws, design principles, and micro-fabrication processes, supported by numerous illustrations for clarity. This volume is also beneficial for researchers and professionals seeking an introductory guide to the field.