Introduction to Micromechanisms and Microactuators

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Focusing on micromechanisms and microactuators, this book serves as a foundational resource, addressing the mechanical manipulative aspects often overlooked in existing literature. It is designed for undergraduate and introductory graduate courses, covering essential topics such as miniaturization, scaling laws, design principles, and micro-fabrication processes. With numerous figures and illustrations, it facilitates comprehension, making it a valuable tool for both students and professionals seeking to understand the mechanics of these systems.