High performance micro scanners for miniature laser projection displays

A high performance micro scanner is a critical element to enable efficient beamsteering in miniature laser projection displays. Such scanner requires a large mirror size, large scan angles, and a high frequency to ensure good optical resolutions. However, these conditions also induce large dynamic deformations on the mirror plate, resulting in optical aberrations. This dissertation describes a new design of two-dimensional micro scanner with good dynamic flatness. The design targeted to achieve a resolution analogue to VGA video requirements (640 pixels x 480 pixels) with a modulation transfer function (MTF) value of 0.5. A portion of the dissertation is dedicated to the fracture strength investigations of single crystal silicon torsion springs. The fracture strength knowledge will contribute to the design of a reliable micro scanner under high frequency, large angle actuation conditions.